Produktsuche
Siridion® DCS
Dichlorosilane (SiH2Cl2) is prepared from trichlorosilane by disproportionation.
Anwendungsbereich
Dichlorosilane is used for the deposition of epitactic silicon layers on silicon wafers in semiconductor manufacturing.
Dichlorosilane (SiH2Cl2) is prepared from trichlorosilane by disproportionation.
Dichlorosilane is used for the deposition of epitactic silicon layers on silicon wafers in semiconductor manufacturing.
