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Siridion® HCDS

Hexachlorodisilane is a liquid colourless, pungent-smelling chlorosilane.

Anwendungsbereich

High purity hexachlorodisilane is used as precursor for low temperature chemical vapour deposition of thin film layers of SiN, SiON or epitaxial Si in semiconductor manufacturing processes. In addition, hexachlorodisilane can be utilized for the selective reduction of phosphine oxides in the pharmaceutical industry.